1. Sagatelyan, G.R., Novoselov, K.L., Shishlov, A.V., and Shchukin, S.A., The application of nanotechnology methods for manufacturing of a plate of a pendulous accelerometer, Inzh. Zh.: Nauka Innov., 2013, no. 6 (18).
2. Kozlov, D.V., Smirnov, I.P., Korpukhin, A.S., Zapet-lyaev, V.M., and Isakova, G.A., A method of manufacturing a sensitive element of the accelerometer, RF Patent no. 2656109 C1, Byull. Izobret., 2018, no. 16.
3. Bom, S.Dzh., Optimization of parameters and modeling of operating modes in compensation accelerometers of the Q-flex and Si-flex type, Cand. Sci. (Tech. Sci.) Dissertation, Moscow, 2012.
4. Jung, H.C., Design and fabrication of microfluidic devices for electrokinetic studies, Master’s Thesis, Ohio: Ohio State Univ., 2008.
5. Kim, D.W., Lee, H.Y., Park, B.J., Kim, H.S., Sung, Y.J., Chae, S.H., Ko, Y.W., and Yeom, G.Y., High rate etching of 6H-SiC in SF6-based magnetically-enhanced inductively coupled plasmas, Thin Solid Films, 2004, nos. 447–448, pp. 100–104.