Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Silicon Processing for the VLSI Era;S. Wolf,2000
2. Nojiri, K., Dry Etching Technology for Semiconductors, Tokyo: Springer Int., 2015.
3. Donnelly, V.M. and Kornblit, A., Plasma etching: yesterday, today, and tomorrow, J. Vac. Sci. Technol., 2013, vol. 31, pp. 050825–48.
4. Advanced Plasma Processing Technology, New York: Wiley, 2008.
5. Lieberman, M.A. and Lichtenberg, A.J., Principles of Plasma Discharges and Materials Processing, New York: Wiley, 2005.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献