Ion-Assisted Magnetron Deposition of AlN Films
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Publisher
Pleiades Publishing Ltd
Link
https://link.springer.com/content/pdf/10.1134/S1063739723600309.pdf
Reference18 articles.
1. Pinto, R.M.R., Gund, V., Dias, R.A., Nagaraja, K.K., and Vinayakumar, K.B., CMOS-integrated aluminum nitride MEMS: A review, J. Microelectromech. Syst., 2022, vol. 30, no. 4, pp. 500–523. https://doi.org/10.1109/JMEMS.2022.3172766
2. Gao, A., Liu, K., Liang, J., and Wu, T., AlN MEMS filters with extremely high bandwidth widening capability, Microsyst. Nanoeng., 2020, vol. 6, p. 74. https://doi.org/10.1038/s41378-020-00183-5
3. Yang, D., Yang, L., Chen, X., Qu, M., Zhu, K., Ding, H., Li, D., Bai, Y., Ling, J., Xu, J., and Xie, J., A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density, Sens. Actuator A Phys., 2021, vol. 318, p. 112493. https://doi.org/10.1016/j.sna.2020.112493
4. Martin, F., Muralt, P., Dubois, M.-A., and Pezous, A., Thickness dependence of the properties of highly c-axis textured AlN thin films, J. Vac. Sci. Technol. A, 2004, vol. 22, no. 2, pp. 361–365. https://doi.org/10.1116/1.1649343
5. Nguyen, T., Adjeroud, N., Glinsek, S., Fleming, Y., Guillot, J., Grysan, P., and Polesel-Maris, J., A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition, APL Mater, 2020, vol. 8, no. 7, p. 071101. https://doi.org/10.1063/5.0011331
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