Simulation of Silicon Field-Effect Conical GAA Nanotransistors with a Stacked SiO2/HfO2 Subgate Dielectric
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Published:2024-06
Issue:3
Volume:53
Page:237-244
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ISSN:1063-7397
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Container-title:Russian Microelectronics
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language:en
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Short-container-title:Russ Microelectron
Publisher
Pleiades Publishing Ltd
Reference28 articles.
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