New organometallic precursors and processes for chemical vapor deposition in the technology of nanomaterials
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Published:2013-11-14
Issue:8
Volume:42
Page:439-447
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ISSN:1063-7397
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Container-title:Russian Microelectronics
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language:en
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Short-container-title:Russ Microelectron
Author:
Kuznetsov F. A.,Smirnova T. P.,Fainer N. I.,Morozova N. B.,Igumenov I. K.
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference25 articles.
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