Sputtering of the target surface by Cs+ ions: Steady-state concentration of implanted cesium and emission of CsM+ cluster ions-Reference-Cited by-同舟云学术

Sputtering of the target surface by Cs+ ions: Steady-state concentration of implanted cesium and emission of CsM+ cluster ions

Published:2013-05 Issue:5 Volume:58 Page:735-743
ISSN:1063-7842
Container-title:Technical Physics
language:en
Short-container-title:Tech. Phys.

Author:

Kudriavtsev Yu.,Asomoza R.,Mansurova M.,Perez L. A.,Korol’ V. M.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/S1063784213050125.pdf

Reference46 articles.

1. I. A. Abroyan, A. N. Andronov, and A. I. Titov, Physical Foundations of Eelectron and Ion Technology (Vysshaya Shkola, Moscow, 1984), p. 119.

2. A. Beninghoven, R. G. Rudenauer, and H. W. Werner, Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Application and Trends (Wiley, New York, 1987), p. 310.

3. W. Reuter and K. Wittmaack, Appl. Surf. Sci. 5, 221 (1980).

4. M. L. Yu, Sputtering by Particle Bombardment III, Ed. by R. Behrisch (Springer, Berlin, 1991), p. 91.

5. A. Villegas, Yu. Kudriavtsev, A. Godines, and R. Asomoza, Appl. Surf. Sci. 203–204, 94 (2003).

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