Subject
Physics and Astronomy (miscellaneous)
Reference25 articles.
1. F. A. Stevie, P. M. Kahora, D. S. Simons, and P. Chi, J. Vac. Sci. Technol. A 4, 76 (1988).
2. K. Elst and W. Vandervorst, J. Vac. Sci. Technol. A 12, 3205 (1994).
3. G. Carter, Surf. Interface Anal. 25, 36 (1997).
4. V. K. Smirnov, D. S. Kibalov, et al., Nucl. Instrum. Methods Phys. Res. B 147, 310 (1999).
5. A. P. Yalovets, Prikl. Mekh. Tekh. Fiz. 38, 151 (1997).
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