Structure and properties of zinc oxide films deposited in the recombination burning zone of a low-temperature plasma-Reference-Cited by-同舟云学术

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Structure and properties of zinc oxide films deposited in the recombination burning zone of a low-temperature plasma

Published:2007-05 Issue:5 Volume:52 Page:663-665
ISSN:1063-7842
Container-title:Technical Physics
language:en
Short-container-title:Tech. Phys.

Author:

Burylin E. I.,Veselov A. G.,Dzhumaliev A. S.,Elmanov V. I.,Istomin S. N.,Kiryasova O. A.,Pushkareva T. A.,Ryabushkin S. L.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/S1063784207050209.pdf

Reference4 articles.

1. B. S. Danilin and V. K. Syrchin, Magnetron Sputtering Systems (Radio i Svyaz’, Moscow, 1982) [in Russian].

2. L. I. Maissel and R. Glang, Handbook of Thin Film Technology (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977).

3. A. G. Veselov and A. S. Dzhumaliev, Zh. Tekh. Fiz. 70(4), 209 (2000) [Tech. Phys. 45, 497 (2000)].

4. E. I. Burylin, A. G. Veselov, A. A. Veselov, et al., Pis’ma Zh. Tekh. Fiz. 26(7), 31 (2000) [Tech. Phys. Lett. 26, 282 (2000)].

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Material of Metal Sublayer and Deposition Configuration on the Texture Formation in the Piezoactive ZnO Films;Technical Physics;2018-01

2. Magnetic activity of Permalloy films grown in the recombination burning zone of a low-temperature plasma;Technical Physics;2008-03

3. Refractive index and lattice constant of zinc oxide films modified in a low-temperature plasma;Technical Physics;2008-03

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