1. U. Helmerson, M. Lattemann, J. Bohlmark, et al., Thin Solid Films 513, 1 (2006).
2. E. V. Grigoryev, V. N. Savenko, D. V. Sheglov, et al., Carbon 36, 581 (1998).
3. E. I. Burylin, A. G. Veselov, A. A. Veselov, et al., Pis’ma Zh. Tekh. Fiz. 26(7), 31 (2000) [Tech. Phys. Lett. 26, 282 (2000)].
4. E. I. Burylin, A. G. Veselov, A. S. Dzhumaliev, Zh. Tekh. Fiz. 77(5), 130 (2007) [Tech. Phys. 52, 663 (2007)].
5. B. S. Danilin and V. K. Syrchin, Magnetron Sputtering Systems (Radio i Svyaz’, Moscow, 1982) [in Russian].