A Novel Model of a Mode-Localized MEMS Accelerometer-Reference-Cited by-同舟云学术

A Novel Model of a Mode-Localized MEMS Accelerometer

Published:2020-10 Issue:10 Volume:65 Page:371-375
ISSN:1028-3358
Container-title:Doklady Physics
language:en
Short-container-title:Dokl. Phys.

Author:

Morozov N. F.,Indeitsev D. A.,Igumnova V. S.,Belyaev Ya. V.,Lukin A. V.,Popov I. A.,Shtukin L. V.

Publisher

Pleiades Publishing Ltd

Subject

General Physics and Astronomy,Mechanics of Materials,Computational Mechanics

Link

http://link.springer.com/content/pdf/10.1134/S1028335820100031.pdf

Reference15 articles.

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2. Y. Hasani, Microsyst. Technol. 25, 1369 (2019).

3. F. Chen, Y. Zhao, J. Wang, H. Zou, M. Kraft, and X. Li, IEEE Sens. J. 18 (5), 1859 (2018).

4. Ya.V. Belyaev, A. A. Belogurov, A. N. Bocharov, D. V. Kostygov, I. V. Lemko, A. A. Mikhteeva, A. V. Yakimova, N. N. Nevirkovets, and N. M. Chernetskaya, in Proc. 25th St. Petersburg Int. Conf. on Integrated Navigation Systems (ICINS), St. Petersburg, May 28–30,2018 (St. Petersburg, 2018), pp. 1–7.

5. S. A. Zotov, B. R. Simon, A. A. Trusov, and A. M. Shkel, IEEE Sens. J. 15 (9), 5045 (2015).

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