Model of a Micromechanical Mode-Localized Accelerometer with an Initially Curved Microbeam as a Sensitive Element
Author:
Publisher
Allerton Press
Subject
General Physics and Astronomy,Mechanics of Materials
Link
https://link.springer.com/content/pdf/10.3103/S0025654422601355.pdf
Reference68 articles.
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2. Ya.V. Belyaev, A. A. Belogurov, A. N. Bocharov, et al. “Design of a micromechanical accelerometer,” in 25th Saint Petersburg Int. Conference on Integrated Navigation Systems (ICINS) (IEEE, 2018), pp. 1–7. https://doi.org/10.23919/ICINS.2018.8405921
3. C. Wang, F. Chen, Y. Wang, et al., “Micromachined accelerometers with Sub-μg/Hz noise floor: a review,” Sensors 20, 4054 (2020). https://doi.org/10.3390/s20144054
4. N. F. Morozov, D. A. Indeitsev, V. S. Igumnova, et al., “Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements,” Int. J. Non-Lin. Mech. 138, 103852 (2022). https://doi.org/10.1016/j.ijnonlinmec.2021.103852
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