Comparison of Characteristics of Thin PZT Films on Si-on-Sapphire and Si Substrates-Reference-Cited by-同舟云学术

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Comparison of Characteristics of Thin PZT Films on Si-on-Sapphire and Si Substrates

Published:2021-12-20 Issue: Volume: Page:
ISSN:1063-7834
Container-title:Physics of the Solid State
language:en
Short-container-title:Phys. Solid State

Author:

Delimova L. A.,Zaitseva N. V.,Ratnikov V. V.,Yuferev V. S.,Seregin D. S.,Vorotilov K. A.,Sigov A. S.

Publisher

Pleiades Publishing Ltd

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1134/S1063783421080060.pdf

Reference30 articles.

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2. N. Setter, D. Damjanovic, L. Eng, G. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N. Y. Park, G. B. Stephenson, I. Stolitchnov, A. K. Taganstev, D. V. Taylor, T. Yamada, and S. Streiffer, J. Appl. Phys. 100, 051606 (2006). https://doi.org/10.1063/1.2336999

3. G. L. Smith, J. S. Pulskamp, L. M. Sanchez, D. M. Potrepka, R. M. Proie, T. G. Ivanov, R. Q. Rudy, W. D. Nothwang, S. S. Bedair, Ch. D. Meyer, and R. G. Polcawich, J. Am. Ceram. Soc. 95, 1777 (2012). https://doi.org/10.1111/j.1551-2916.2012.05155.x

4. I. Kanno, Jpn. J. App. Phys. 57, 040101 (2018). https://doi.org/10.7567/JJAP.57.040101

5. R. R. Benoit, R. Q. Rudy, J. S. Pulskamp, R. G. Polcawich, and S. S. Bedair, J. Micromech. Microeng. 27, 083002 (2017). https://doi.org/10.1088/1361-6439/aa710b

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