Possibilities and Limitations of CMOS Technology for the Production of Various Microelectronic Systems and Devices-Reference-Cited by-同舟云学术

Possibilities and Limitations of CMOS Technology for the Production of Various Microelectronic Systems and Devices

Published:2022-02 Issue:1 Volume:17 Page:24-38
ISSN:2635-1676
Container-title:Nanobiotechnology Reports
language:en
Short-container-title:Nanotechnol Russia

Author:

Bespalov V. A.,Dyuzhev N. A.,Kireev V. Yu.

Publisher

Pleiades Publishing Ltd

Subject

Electrical and Electronic Engineering,Engineering (miscellaneous),Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://link.springer.com/content/pdf/10.1134/S2635167622010037.pdf

Reference52 articles.

1. N. A. Dyuzhev and V. Yu. Kireev, Element Basis of Nano-and Microsystem Technology, The School-Book (IPC MIET, Moscow, 2019) [in Russian].

2. International Roadmap for Devices and SystemsTM (IRDS), ed. 2021, Executive Summary (Inst. Electric. Electron. Eng., Inc., 2021).

3. The International Technology Roadmap for Semiconductors, ed. 2013, Executive Summary (Semicond. Industry Assoc., San Jose, CA, 2013).

4. V. Verner, G. Kuznetsov, and A. Saurov, Nano Industry, No. 4 (58), 22 (2015).

5. T. V. Svistova, Basics of Microelectronics, The School-Book (VGTU, Voronezh, 2017) [in Russian].

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