Author:
Lisenkov V. Yu.,Kharkov M. M.,Kolodko D. V.,Tumarkin A. V.,Kaziev A. V.
Reference14 articles.
1. K. Strijckmans, R. Schelfhout, and D. Depla, J. Appl. Phys. 124, 241101 (2018).
2. V. I. Shapovalov, Materials (Basel) 16, 3258 (2023).
3. R. Graillot-Vuillecot, A.-L. Thomann, T. Lecas, et al., Vacuum 197, 110813 (2022).
4. R. Chodun, M. Dypa, B. Wicher, et al., Appl. Surf. Sci. 574, 151597 (2022).
5. M. L. Reed and G. K. Fedder, Handbook of Sensors and Actuators (Springer, New York, 1998).