Features of the α-γ transition in a low-pressure rf argon discharge-Reference-Cited by-同舟云学术

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Features of the α-γ transition in a low-pressure rf argon discharge

Published:1998-05 Issue:5 Volume:43 Page:526-534
ISSN:1063-7842
Container-title:Technical Physics
language:en
Short-container-title:Tech. Phys.

Author:

Lisovskii V. A.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/1.1259033.pdf

Reference43 articles.

1. D. L. Flamm, V. M. Donnelley, and D. E. Ibbotson, J. Vac. Sci. Technol. 1, 23 (1983).

2. J. M. Coburn and E. Kay, IBM J. Res. Dev. 23, 33 (1979).

3. V. I. Myshenkov, and N. A. Yatsenko, Kvantovaya Élektron. (Moscow) 8, 2121 (1981) [Sov. J. Quantum Electron. 11, 1297 (1981)].

4. Y. P. Raizer, M. N. Shneider, and N. A. Yatsenko, Radio-Frequency Capacitive Discharges, CRC Press, Boca Raton (1995).

5. S. M. Levitskii, Zh. Tekh. Fiz. 27, 970 (1957) [Sov. Phys. Tech. Phys. 2, 887 (1957)].

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