Synthesis of anodic silicon oxide films in water-organic solutions containing orthophosphoric acid-Reference-Cited by-同舟云学术

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Synthesis of anodic silicon oxide films in water-organic solutions containing orthophosphoric acid

Published:2006-04 Issue:4 Volume:42 Page:320-325
ISSN:1023-1935
Container-title:Russian Journal of Electrochemistry
language:en
Short-container-title:Russ J Electrochem

Author:

Baranov I. L.,Tabulina L. V.,Stanovaya L. S.,Rusal’skaya T. G.

Publisher

Pleiades Publishing Ltd

Subject

Electrochemistry

Link

http://link.springer.com/content/pdf/10.1134/S1023193506040069.pdf

Reference10 articles.

1. Compano, R. and Hullmann, A., Nanotechnology, 2002, vol. 13, p. 243.

2. Merkle, R.C., IEEE Spectrum, 2001, vol. 38, p. 19.

3. Tekhnologiya SBIS (VLSI Technology) Sze, S., Ed., Moscow: Mir, 1986, vol. 1.

4. Mileshko, L.P. and Chistyakov, Yu.D., Obzor (A Review), Moscow: Mosk. Inst. Elektron. Tekhnol., 1977.

5. Mileshko, L.P., Sorokin, I.N., and Chistyakov, Yu.D., Elektron. Tekh., 1979, issue 3 (81), p. 99.

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3. Specific features of synthesis, chemical composition, and thermal stability of anodic borosilicate coatings on silicon;Russian Journal of Applied Chemistry;2007-09

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