Specific features of synthesis, chemical composition, and thermal stability of anodic borosilicate coatings on silicon-Reference-Cited by-同舟云学术

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Specific features of synthesis, chemical composition, and thermal stability of anodic borosilicate coatings on silicon

Published:2007-09 Issue:9 Volume:80 Page:1509-1514
ISSN:1070-4272
Container-title:Russian Journal of Applied Chemistry
language:en
Short-container-title:Russ J Appl Chem

Author:

Baranov I. L.,Tabulina L. V.,Stanovaya L. S.,Rusal’skaya T. G.,Shostak Yu. A.

Publisher

Pleiades Publishing Ltd

Subject

General Chemical Engineering,General Chemistry

Link

http://link.springer.com/content/pdf/10.1134/S1070427207090133.pdf

Reference18 articles.

1. Merkle, R.C., IEEE Spectrum, 2001, vol. 38, no. 1, pp. 19–21.

2. Mileshko, L.P., Avdeev, S.P., and Nestyurina, E.E., Fiz. Khim. Obrab. Mater., 2003, no. 3, pp. 47–52.

3. Mileshko, L.P. and Varzaev, Yu.N., Fiz. Khim. Obrab. Mater., 2002, no. 3, pp. 38–44.

4. Mileshko, L.P. and Chistyakov, Yu.D., Elektronnaya tekhnika: Obzor Moskovskogo universiteta (Electronics Technology: Review Publication by Moscow Univ.), Moscow: Mosk. Gos. Univ., 1977.

5. Mileshko, L.P., Sorokin, I.N., and Chistyakov, Yu.D., Elektron. Tekh., Ser. 3: Mikroelektronika, 1979, no. 3(8), pp. 99–101.

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