Synthesis of Diamonds from the Microwave Plasma with the Use of Supersonic Gas Flows
Author:
Publisher
Pleiades Publishing Ltd
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics
Link
http://link.springer.com/content/pdf/10.1134/S0021894418050012.pdf
Reference18 articles.
1. A. P. Bolshakov, V. G. Ralchenko, V. Y. Yurov, et al., “High–Rate Growth of Single Crystal Diamond in Microwave Plasma in CH4/H2 and CH4/H2/Ar Gas Mixtures in Presence of Intensive Soot Formation,” Diam. Relat. Mater. 62, 49–57 (2016).
2. K. An, S. W. Yu, X. J. Li, et al., “Microwave Plasma Reactor with Conical–Reflector for Diamond Deposition,” Vacuum 117, 112–120 (2015).
3. C. J. Widmann, W. Müller–Sebert, N. Lang, and C. E. Nebel, “Homoepitaxial Growth of Single Crystalline CVD–Diamond,” Diam. Relat. Mater. 64, 1–7 (2016).
4. Y. Gu, J. Lu, T. Grotjohn, et al., “Microwave Plasma Reactor Design for High Pressure and High Power Density Diamond Synthesis,” Diam. Relat. Mater. 24, 210–214 (2012).
5. J. Weng, F. Liu, L. W. Xiong, et al., “Deposition of Large Area Uniform Diamond Films by Microwave Plasma CVD,” Vacuum 147, 134–142 (2018).
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