The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine ToolsAnwendung eines Zweistrahl-Laserinterferometers zur Kalibrierung von Präzisionswerkzeugen-Reference-Cited by-同舟云学术

The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine ToolsAnwendung eines Zweistrahl-Laserinterferometers zur Kalibrierung von Präzisionswerkzeugen

Published:2009-05 Issue:5 Volume:76 Page:245-247
ISSN:0171-8096
Container-title:tm - Technisches Messen
language:en
Short-container-title:

Author:

Liu Chien-Hung¹,Jywe Wen-Yuh,Jäger Gerd²,Jeng Yeau-Ren³,Hsu Tung-Hui⁴,Teng Yun-Feng⁵,Chen I-Ching⁶,Huang Hsueh-Liang⁷,Wang Ming-Shi⁷,Duan Li-Li⁸,Jwo Hsin-Hung⁹

Affiliation:

1. National Formosa University, Institute of Electro-Optical and Materials Science, Taiwan

2. TU-Ilmenau, Fakultät für Maschinenbau, Institut Prozessmess- und Sensortechnik, Ilmenau

3. National Chung Cheng University , Department of Mechanical Engineering, Taiwan

4. National Chung Chen University, Department of Mechanical Engineering, Taiwan

5. National Chung Cheng University, Institute of Mechanical Engineering, Taiwan

6. National Formosa University, Graduate Institute of Electro-Optical and Material, Taiwan

7. National Cheng Kung University, Development of Engineering Science, Taiwan

8. National Formosa University, Department of Automation Engeneering, Taiwan

9. National Formosa University, Department of Automation Engineering, Taiwan

Abstract

Abstract In this paper, a dual-beam laser interferometer measurement system for precision machine tools was presented. The straightness measurement module and the angular measurement module were combined to form this measurement system such that the operations of precision machine tools, the positioning, vertical straightness, horizontal straightness, pitch and yaw, can be obtained. The resolution of the positioning, straightness and angle has achieved 0.1 nm, 1 nm and 0.1 arcsec, respectively. The performance of this measurement system has been proved by experiments.

Publisher

Walter de Gruyter GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

Link

https://www.degruyter.com/document/doi/10.1524/teme.2009.0963/pdf

Reference11 articles.

1. A simple method for testing measuring machines and machine tools Part 1: Principles and applications

2. Verification and evaluation method for volumetric and positional errors of CNC machine tools

3. Application of Ball Bar System and Genetic Algorithms for CNC Lathe Contouring Compensation

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