P-190L: Late-News Poster: Thermal Durability of Poly-Si Films on Highly Engineered Glass for RTA Processes Enabling Advanced TFTs

Author:

Itoh Taketsugu,Mugiraneza Jean D.,Miyahira Tomoyuki,Sakamoto Akinori,Chen Yeh,Okada Tasuya,Noguchi Takashi

Publisher

Wiley

Reference17 articles.

1. Y.S. Park, “Oxide Thin Film Transistor”,Tutorial Note 1–2 of IMID/IDMC/Asia Display '08, no. T1-2, pp.28–59, 2008.

2. T. Hayashi, E. Takahashi, Y. Nishigami, A. Tomyo, M. Fujiwara, H. Kaki, K. Kubota, K. Ogata, A. Ebe and Y. Setsuhara, “Large Area and High Speed Deposition of Microcrystalline Si Film by ICP with International Low-Inductance Antenna”,Digest of Technical Papers of AM-FPD 06, pp. 99–102, 2006.

3. Recrystallization of amorphized polycrystalline silicon films on SiO2: Temperature dependence of the crystallization parameters

4. Low-Temperature Crystallization of Hydrogenated Amorphous Silicon Induced by Nickel Silicide Formation

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