Effects of high-flux low-energy ion bombardment on the low-temperature growth morphology of TiN(001) epitaxial layers
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.61.16137/fulltext
Reference36 articles.
1. Origins of scale invariance in growth processes
2. Stable and unstable growth in molecular beam epitaxy
3. Atomic View of Surface Self‐Diffusion: Tungsten on Tungsten
4. Step-Adatom Attraction as a New Mechanism for Instability in Epitaxial Growth
Cited by 45 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of low-energy ion assistance on the properties of sputtered ZrB2 films;Vacuum;2022-01
2. Thermoelectric effect and a thermoelectric generator based on carbon nanostructures: achievements and prospects;Physics-Uspekhi;2021-09-01
3. Synthesis and study of highly dense and smooth TiN thin films;Materials Chemistry and Physics;2021-07
4. Study of columnar growth, texture development and wettability of reactively sputter-deposited TiN, ZrN and HfN thin films at glancing angle incidence;Surface and Coatings Technology;2020-10
5. Tuning high power impulse magnetron sputtering discharge and substrate bias conditions to reduce the intrinsic stress of TiN thin films;Thin Solid Films;2019-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3