Microvoids at theSiO2/Si interface
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.40.1434/fulltext
Reference26 articles.
1. High-Resolution X-Ray Photoelectron Spectroscopy as a Probe of Local Atomic Structure: Application to Amorphous SiO2and the Si-SiO2Interface
2. Chemical and electronic structure of the SiO2/Si interface
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4. Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
5. Silicon oxidation studies: A revised model for thermal oxidation
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