Experimental test of models of high-plasma-density, radio-frequency sheaths
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.59.1059/fulltext
Reference59 articles.
1. Electrical characteristics of parallel-plate RF discharges in argon
2. Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell
3. Electrical optimization of plasma-enhanced chemical vapor deposition chamber cleaning plasmas
4. Application of RF Discharges to Sputtering
5. Rf sputtering–voltage division between two electrodes
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