Negative ions in a radio-frequency oxygen plasma
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.51.2425/fulltext
Reference39 articles.
1. Oxygen discharge cleaning method for aluminum storage ring vacuum chambers
2. A review of the plasma oxidation of silicon and its applications
3. Radio-frequency (RF) plasma etching of graphite with oxygen: a scanning tunnelling microscope study
4. Decomposition of fluorocarbon gaseous contaminants by surface discharge-induced plasma chemical processing
5. Optical techniques in plasma diagnostics
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