Electron kinetics and non-Joule heating in near-collisionless inductively coupled plasmas
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.55.3408/fulltext
Reference37 articles.
1. Electron distribution function in a low-pressure inductively coupled plasma
2. Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge
3. Modeling of nonlocal electron kinetics in a low-pressure inductively coupled plasma
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