Two-dimensional nonlocal model of axially and radially inhomogeneous plasma of cylindrical magnetron discharge
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.68.016401/fulltext
Reference22 articles.
1. Radial current distribution at a planar magnetron cathode
2. Longitudinal distribution of plasma density in the low-pressure glow discharge with transverse magnetic field
3. Model of the cathode fall region in magnetron discharges
4. A self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method
5. The cylindrical DC magnetron discharge: I. Particle-in-cell simulation
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