A self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/32/i=10/a=311/pdf
Reference31 articles.
1. Monte Carlo numerical analysis of target erosion and film growth in a three‐dimensional sputtering chamber
2. Radial current distribution at a planar magnetron cathode
3. Axial distribution of optical emission in a planar magnetron discharge
4. Diagnostics of direct‐current‐magnetron discharges by the emission‐selected computer‐tomography technique
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