Retention or repulsion forces induced by bubbles trapped at the base of an immersed microparticle on a substrate-Reference-Cited by-同舟云学术

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Retention or repulsion forces induced by bubbles trapped at the base of an immersed microparticle on a substrate

Published:2024-08-02 Issue:8 Volume:9 Page:
ISSN:2469-990X
Container-title:Physical Review Fluids
language:en
Short-container-title:Phys. Rev. Fluids

Author:

Ipatova Anna¹^ORCID,Duchesne Alexis¹^ORCID,Yoshikawa H. N.²^ORCID,Mariot Pascal¹^ORCID,Leroy Corenthin¹,Faille Christine¹,Ueno Ichiro³^ORCID,Dietze Georg F.⁴^ORCID,Zoueshtiagh Farzam¹^ORCID

Affiliation:

1. Université de Lille

2. Université Côte d'Azur

3. Tokyo University of Science

4. Université Paris-Saclay

Funder

Japan Society for the Promotion of Science

Agence Nationale de la Recherche

Tokyo University of Marine Science and Technology

Publisher

American Physical Society (APS)

Link

http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevFluids.9.084301/fulltext

Reference22 articles.

1. Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements

2. Particulate Contamination and Microelectronics Manufacturing: An Introduction

3. Understanding of wet and alternative particle removal processes in microelectronics: theoretical capabilities and limitations

4. An Analysis of Particle Adhesion on Semiconductor Surfaces

5. Recent progress in coating technology for surface modification of automotive glass

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