Publisher
American Physical Society (APS)
Cited by
5 articles.
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1. Large area three dimensional structure fabrication using multilayer electron beam lithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
2. Accelerator based epithermal neutron source;Physics of Particles and Nuclei;2015-11
3. Hydrogen implantation in semiconductors;Physica B: Condensed Matter;1991-04
4. Hydrogen implantation in semiconductors;Hydrogen in Semiconductors;1991
5. Factors affecting the distributions of implanted ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-11