Deep-subwavelength lithography via graphene plasmons
Author:
Funder
Qatar National Research Fund
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.95.053850/fulltext
Reference40 articles.
1. Fundamental Principles of Optical Lithography
2. Quantum lithography: A non-computing application of quantum information
3. Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit
4. Two-Photon Diffraction and Quantum Lithography
5. Comment on “Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit”
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