1. Sheats JR, Smith BW (eds) (1998) Microlithography Science and Technology, 1st Edition. Marcel Dekker Inc, New York
2. Wong AK-K (2001) Resolution Enhancement Techniques in Optical Lithography. SPIE – International Society for Optical Engineers, Tutorial Texts in Optical Engineering, TT 47, ISBN: 0-8194-3995-9
3. Litt LC, Roman B, Conley W, Cobb J (2004) Equipment Options on the Road to the 22 nm Node: Decisions, Decisions, Fut Fab Intl 17 http://www.future-fab.com/documents.asp?d_ID=2613
4. Brueck S (2004) Optical Litho: There Are No Fundamental Limits. In: Opto and Laser Europe. See http://www.optics.org/articles/ole/9/6/2/1
5. See for example http://www.nanotechweb.org/articles/news/3/7/16/1 (2004)