Observation of a Distributed Epitaxial Oxide in Thermally Grown SiO2on Si(001)
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.75.4254/fulltext
Reference13 articles.
1. Oxidation of silicon
2. On the Kinetics of the Thermal Oxidation of Silicon: III . Coupling with Other Key Phenomena
3. On the Kinetics of the Thermal Oxidation of Silicon: IV . The Two‐Layer Film Approximation
4. The thermal oxidation of silicon the special case of the growth of very thin films
5. Si→SiO2transformation: Interfacial structure and mechanism
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