Direct measurement of reaction kinetics for the decomposition of ultrathin oxide on Si(001) using scanning tunneling microscopy
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.69.339/fulltext
Reference10 articles.
1. Kinetics of high‐temperature thermal decomposition of SiO2 on Si(100)
2. Defect microchemistry in SiO2/Si structures
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5. A comparative study of O2, H2 and H2O adsorption on Si(100)
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