Correlation Analysis of Waves above a Capacitive Plasma Applicator
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.103.045003/fulltext
Reference17 articles.
1. Analytical solution for capacitive RF sheath
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5. On asymptotic matching and the sheath edge
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