Correlation between physical properties and hydrogen concentration in magnetron-sputtered amorphous silicon
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.33.7022/fulltext
Reference19 articles.
1. Infrared vibrational spectra of rf-sputtered hydrogenated amorphous silicon
2. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
3. Sputtered hydrogenated amorphous silicon
4. Optical properties of reactively sputtered a-SiHx films
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1. Effect of hydrogen dilution on the optical properties of hydrogenated amorphous silicon-nitrogen films prepared by plasma deposition;Philosophical Magazine;2003-09
2. Properties of amorphous Si:H films grown by high‐vacuum codeposition of Si and H atoms;Journal of Applied Physics;1995-06-15
3. Microstructural properties of dc magnetron sputtered a-Si:H by IR spectroscopy;Journal of Non-Crystalline Solids;1992-11
4. Thermal Release of Hydrogen in Sputtered a-SiC : H Films;Journal of the Japan Institute of Metals;1992
5. Inhomogeneity of amorphous silicon thin films from optical transmission and reflection measurements;Journal of Non-Crystalline Solids;1991-01
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