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Nucleation kinetics during homoepitaxial growth of TiN(001) by reactive magnetron sputtering

  • Published:2004-07-21 Issue:3 Volume:70 Page:
  • ISSN:1098-0121
  • Container-title:Physical Review B
  • language:en
  • Short-container-title:Phys. Rev. B

Author:

Wall Marcel A.,Cahill David G.,Petrov I.,Gall D.,Greene J. E.

Publisher

American Physical Society (APS)

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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