Theoretical analysis of scanning capacitance microscopy
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.67.235309/fulltext
Reference7 articles.
1. TWO-DIMENSIONAL DOPANT PROFILING BY SCANNING CAPACITANCE MICROSCOPY
2. Capacitance–voltage measurement and modeling on a nanometer scale by scanning C–V microscopy
3. Quantitative measurement of two-dimensional dopant profile by cross-sectional scanning capacitance microscopy
4. Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors
5. Model database for determining dopant profiles from scanning capacitance microscope measurements
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