Competition between strain and chemistry effects on adhesion of Si and SiC
Author:
Publisher
American Physical Society (APS)
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.79.094109/fulltext
Reference26 articles.
1. Nanotribology and MEMS
2. Failure mechanisms of a MEMS actuator in very high vacuum
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4. SiC MEMS: opportunities and challenges for applications in harsh environments
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