Enhanced sulfurization reaction of molybdenum using a thermal cracker for forming two-dimensional MoS2 layers-Reference-Cited by-同舟云学术

Enhanced sulfurization reaction of molybdenum using a thermal cracker for forming two-dimensional MoS2 layers

Published:2018 Issue:23 Volume:20 Page:16193-16201
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Cho Dae-Hyung¹²³⁴⁵^ORCID,Lee Woo-Jung¹²³,Wi Jae-Hyung¹²³,Han Won Seok¹²³,Yun Sun Jin¹²³⁶⁷,Shin Byungha⁴⁵⁸³^ORCID,Chung Yong-Duck¹²³⁶⁷^ORCID

Affiliation:

1. Electronics and Telecommunications Research Institute (ETRI)

2. Daejeon 34129

3. Republic of Korea

4. Department of Materials Science and Engineering

5. Korea Advanced Institute of Science and Technology (KAIST)

6. Department of Advanced Device Technology

7. Korea University of Science and Technology (UST)

8. Daejeon 34141

Abstract

We propose a method to fabricate two-dimensional (2D) molybdenum disulfide (MoS₂) layers to overcome issues in typical fabrication processes by promoting the sulfurization reaction of molybdenum (Mo).

Funder

Ministry of Science, ICT and Future Planning

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2018/CP/C8CP02390E

Reference67 articles.

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5. $\hbox{MoS}_{2}$ Dual-Gate MOSFET With Atomic-Layer-Deposited $\hbox{Al}_{2}\hbox{O}_{3}$ as Top-Gate Dielectric

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