1. College of Big Data and Information Engineering
2. Guizhou University
3. Guiyang 550025
4. P. R. China
5. Integrated Circuit Advanced Process Center (ICAC)
6. Institute of Microelectronics of Chinese Academy of Sciences (IME CAS)
7. Beijing 100029
8. The Integrated Circuit Materials & Components Industry Technology Innovative Alliance
9. Beijing 100083
10. School of Electronic Engineering
11. Chengdu Technological University
12. Jiangsu HanTop Photo-Materials Co., Ltd
13. Shanghai