Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass-Reference-Cited by-同舟云学术

Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass

Published:2014 Issue:18 Volume:14 Page:3447-3458
ISSN:1473-0197
Container-title:Lab Chip
language:en
Short-container-title:Lab Chip

Author:

Sugioka Koji¹²,Xu Jian¹²,Wu Dong¹²,Hanada Yasutaka³⁴⁵,Wang Zhongke⁶⁷,Cheng Ya⁸⁹¹⁰,Midorikawa Katsumi¹²

Affiliation:

1. RIKEN Center for Advanced Photonics

2. Wako, Japan

3. Hirosaki University

4. Graduate School of Science and Technology

5. Hirosaki, Japan

6. Singapore Institute of Manufacturing Technology

7. , Singapore 638075

8. Shanghai Institute of Optics and Fine Mechanics

9. Chinese Academy of Sciences

10. Shanghai 201800, China

Abstract

Femtosecond laser micromachining can directly fabricate three-dimensional (3D) microfluidic devices integrated with functional microcomponents in glass microchips.

Publisher

Royal Society of Chemistry (RSC)

Subject

Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering

Link

http://pubs.rsc.org/en/content/articlepdf/2014/LC/C4LC00548A

Reference81 articles.

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2. Ultrafast lasers—reliable tools for advanced materials processing

3. Short-pulse laser ablation of solid targets

4. Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses

5. Ablation of uv-transparent materials with femtosecond uv excimer laser pulses

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