Catalytic effects of electrode material on the silicon tetrachloride hydrogenation in RF-arc-discharge
Author:
Affiliation:
1. Nizhny Novgorod State Technical University n.a. R.E. Alekseev
2. Nizhny Novgorod
3. Russia
4. G.G. Devyatykh Institute of Chemistry of High-Purity Substances
5. Russian Academy of Sciences
6. Institute for Problems in Mechanical Engineering
Abstract
A silicon tetrachloride reduction in RF-arc-discharge (40.86 MHz) has been experimentally studied.
Funder
Ministry of Education and Science of the Russian Federation
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA21023F
Reference23 articles.
1. Catalytic conversion of silicon tetrachloride to trichlorosilane for a poly-Si process
2. Preparation of trichlorosilane by plasma hydrogenation of silicon tetrachloride
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4. CuCl-Catalyzed Hydrogenation of Silicon Tetrachloride in the Presence of Silicon: Mechanism and Kinetic Modeling
5. Hydrogenation of Silicon Tetrachloride in the Presence of Silicon: Thermodynamic and Experimental Investigation
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