Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates
Author:
Affiliation:
1. SiMPore
2. West Henrietta, USA
3. Department of Biomedical Engineering
4. University of Rochester
5. Rochester, USA
6. Rochester Institute of Technology
Abstract
Free standing ultrathin nanoporous silicon nitride membranes are fabricated on a wafer scale by transferring the pores from porous nanocrystalline silicon into a silicon nitride film by reactive ion etch.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2014/NR/C4NR03070B
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