Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions-Reference-Cited by-同舟云学术

Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions

Published:2019 Issue:47 Volume:21 Page:26041-26048
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Chen Lei¹²³⁴⁵,Ngo Dien⁶⁷⁸⁹^ORCID,Luo Jiawei⁶⁷⁸⁹,Gong Yunfei¹²³⁴⁵,Xiao Chen¹²³⁴⁵,He Xin⁶⁷⁸⁹,Yu Bingjun¹²³⁴⁵,Qian Linmao¹²³⁴⁵^ORCID,Kim Seong H.⁶⁷⁸⁹^ORCID

Affiliation:

1. Tribology Research Institute

2. Key Laboratory of Advanced Technology of Materials

3. Ministry of Education

4. Southwest Jiaotong University

5. Chengdu 610031

6. Department of Chemical Engineering and Materials Research Institute

7. Pennsylvania State University

8. University Park

9. USA

Abstract

The structure and isotherm thickness of physisorbed water on a Si/SiO_x surface depend on surface wettability and the physical structure of the oxide layer.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2019/CP/C9CP04776J

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