Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
Author:
Affiliation:
1. Department of Applied Physics
2. Eindhoven University of Technology
3. 5600 MB Eindhoven
4. The Netherlands
5. Imec
6. Leuven 3001
7. Belgium
8. Department of Microbial and Molecular Systems
9. KU Leuven
Abstract
Growth per cycle as a function of process table temperature for both plasma-assisted (squares) and thermal (circles) ALD processes.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/RA/C7RA07722J
Reference34 articles.
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3. Performance and stability of potentiometric CO2 gas sensor based on the Pt, Li2CO3/Na2O–Al2O3–4SiO2//YSZ/Pt electrochemical cell
4. Lithium carbonate as a solid electrolyte
5. Electrochemical cycling behaviour of lithium carbonate (Li2CO3) pre-treated graphite anodes – SEI formation and graphite damage mechanisms
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