1. State Key Laboratory for Manufacturing Systems Engineering
2. Xi'an Jiaotong University
3. Xi'an 710049
4. China
5. Department of Mechanical Engineering
6. Engineering Research Center of Smart Microsensors and Microsystems
7. Ministry of Education
8. College of Electronics and Information
9. Hangzhou Dianzi University
10. Hangzhou 310018
11. School of Microelectronics
12. Science and Technology on Combustion and Explosion Laboratory
13. Xi'an Modern Chemistry Research Institute
14. Xi'an 710065
15. Guangdong Institute of New Materials
16. Guangzhou 510650
17. City University of Hong Kong
18. Kowloon 999077
19. Hong Kong
20. Electronic Materials Research Laboratory
21. Key Laboratory of the Ministry of Education
22. International Center for Dielectric Research
23. School of Electronic Science and Engineering
24. Faculty of Electronic and Information Engineering