Voltage-triggered insulator-to-metal transition of ALD NbOx thin films for a two-terminal threshold switch

Author:

Park Narae1234,Kim Yong Tae15674,Park Yunkyu1234,Cho Jae Yu15674,Oh Seung Soo1234ORCID,Heo Jaeyeong15674ORCID,Son Junwoo1234ORCID

Affiliation:

1. Department of Materials Science and Engineering (MSE)

2. Pohang University of Science and Technology (POSTECH)

3. Pohang 37673

4. Republic of Korea

5. and Optoelectronics Convergence Research Center

6. Chonnam National University

7. Gwangju 61186

Abstract

We report two-terminal threshold devices that use niobium oxide (NbOx) thin films that were synthesized using atomic layer deposition (ALD) then pulsed-laser annealing.

Funder

National Research Foundation of Korea

Ministry of Trade, Industry and Energy

Samsung

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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