Investigation of silicon wear against non-porous and micro-porous SiO2 spheres in water and in humid air-Reference-Cited by-同舟云学术

Investigation of silicon wear against non-porous and micro-porous SiO2 spheres in water and in humid air

Published:2016 Issue:92 Volume:6 Page:89627-89634
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Qi Yaqiong¹²³⁴⁵,Chen Lei¹²³⁴⁵,Jiang Shulan¹²³⁴⁵,Yu Jiaxin⁶⁷⁸⁹⁵,Yu Bingjun¹²³⁴⁵,Xiao Chen¹²³⁴⁵,Qian Linmao¹²³⁴⁵

Affiliation:

1. Tribology Research Institute

2. National Traction Power Laboratory

3. Southwest Jiaotong University

4. Chengdu 610031

5. P. R. China

6. Key Laboratory of Testing Technology for Manufacturing Process

7. Ministry of Education

8. Southwest University of Science and Technology

9. Mianyang 621010

Abstract

Tribochemical wear, a method to achieve controlled material removal without residual damage on substrates, plays a very important role in super-smooth silicon surface manufacturing.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA18152J

Reference52 articles.

1. Role of ionic strength in chemical mechanical polishing of silicon carbide using silica slurries

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