1. Key Lab of Materials Physics
2. Anhui Key Lab of Nanomaterials and Nanotechnology
3. Institute of Solid State Physics
4. Chinese Academy of Sciences
5. Hefei
6. The No. 3 Department
7. Institute of Chemical Defence
8. Beijing
9. China
10. State Key Laboratory of Transducer Technology
11. and the Science and Technology on Micro-system Laboratory
12. Shanghai Institute of Microsystem and Information Technology
13. Shanghai