1. State Key Laboratory of Robotics and System
2. Harbin Institute of Technology
3. Harbin 150001
4. China
5. Microsystem and Terahertz Research Center
6. China Academy of Engineering Physics
7. Chengdu 610200
8. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education
9. Harbin
10. State Key Laboratory of Fluid Power and Mechatronic Systems